14/30280736 DC : 0
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Hardcopy , PDF
10-31-2016
English
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 General outline of the assessment
5 Visual inspection
6 Assessment of suitability by airborne
particle concentration measurements
7 Documentation
8 Statement on cleanroom suitability
Annex A (informative) - Example for data processing
for determining the cleanroom suitability
deriving from measurements
Annex B (informative) - Additional tests as options
Bibliography
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