16/30338636 DC : 0
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
BS IEC 62047-30 - SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 30: MEASUREMENT METHODS OF ELECTRO-MECHANICAL CONVERSION CHARACTERISTICS OF MEMS PIEZOELECTRIC THIN FILM
Hardcopy , PDF
10-31-2017
English
FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Test bed of MEMS piezoelectric
thin film
5 Thin film under testing
6 Test report
Annex A (informative) - Example of measuring
method of MEMS piezoelectric thin film
Bibliography
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