BS ISO 20146 - VACUUM TECHNOLOGY - VACUUM GAUGES - SPECIFICATIONS, CALIBRATION AND MEASUREMENT UNCERTAINTIES FOR CAPACITANCE DIAPHRAGM GAUGE

Available format(s)

Hardcopy , PDF

Language(s)

English

Publisher

British Standards Institution

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Principle of capacitance diaphragm gauge
6 Specifications for capacitance diaphragm
  gauge
7 Additional (Optional) specifications for
  capacitance diaphragm gauge
8 Calibration
9 Measurement uncertainty at use
Annex A (informative) - Compensation of
        thermal transpiration effect
Bibliography

BS ISO 20146.

Committee	MCE/8/-/4
DocumentType	Draft
Pages	24
PublisherName	British Standards Institution
Status	NA

ISO 3567:2011	Vacuum gauges — Calibration by direct comparison with a reference gauge
ISO 3529-3:2014	Vacuum technology Vocabulary Part 3: Total and partial pressure vacuum gauges
ISO/IEC Guide 99:2007	International vocabulary of metrology Basic and general concepts and associated terms (VIM)
ISO 3529-1:1981	Vacuum technology — Vocabulary — Part 1: General terms
ISO 27893:2011	Vacuum technology — Vacuum gauges — Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge
IEC 60050-300:2001	International Electrotechnical Vocabulary (IEV) - Part 300: Electrical and electronic measurements and measuring instruments - Part 311: General terms relating to measurements - Part 312: General terms relating to electrical measurements - Part 313: Types of electrical measuring instruments - Part 314: Specific terms according to the type of instrument
ISO/IEC Guide 98-3:2008	Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995)