BS ISO 14701 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - MEASUREMENT OF SILICON OXIDE THICKNESS

Available format(s)

Hardcopy , PDF

Language(s)

English

Publisher

British Standards Institution

Foreword
Introduction
1 Scope
2 Symbols and abbreviations
3 Outline of method
4 Method for measuring the oxide thickness
Bibliography

BS ISO 14701.

Committee	CII/60
DocumentType	Draft
Pages	24
PublisherName	British Standards Institution
Status	Current

ISO 18116:2005	Surface chemical analysis Guidelines for preparation and mounting of specimens for analysis
ISO/TR 18392:2005	Surface chemical analysis X-ray photoelectron spectroscopy Procedures for determining backgrounds
ISO/IEC Guide 98-3:2008	Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995)