DD ISO/TS 15338:2009
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Hardcopy , PDF
03-11-2020
English
08-31-2009
Foreword
1 Scope
2 Normative references
3 Terms and definitions
4 Safety
4.1 Use of high-voltage power supply and connection
of the instrument
4.2 Use and storage of compressed-gas cylinders
4.3 Handling of cryogenic materials
5 Principle
6 Materials
7 Apparatus
7.1 Ion source
7.2 Mass analyser
7.3 Detector system
7.4 Vacuum system
7.5 Data acquisition and control
8 Samples and sample preparation
8.1 General
8.2 Sample type
8.3 Sample geometry
8.4 Sample preparation for bulk analysis
8.5 Sample preparation for depth profiling
9 Measurement procedures
9.1 System precautions
9.2 Selection of discharge parameters and isotopes
9.3 Presputtering
9.4 Optimizing the ion current
9.5 Analytical set-up
9.6 Data analysis
9.7 Depth profile analysis
9.8 Instrument performance
9.9 Analysis
10 Test report
Bibliography
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