VACUUM TECHNOLOGY - ACCEPTANCE SPECIFICATIONS FOR ION GETTER PUMPS

Available format(s)

Hardcopy , PDF

Language(s)

German

Published date

05-01-2014

Publisher

German Institute for Standardisation (Deutsches Institut für Normung)

1 Scope and field of application
2 Determination of final pressure
      2.1 Concept
      2.2 Measurement conditions
      2.3 Measuring equipment
      2.4 Bakeout and measuring method
3 Determination of air volume flow rate
      3.1 Concepts
      3.2 Measuring equipment
      3.3 Method of measurement of the pV flow rate whilst
             measuring the volume flow rate
      3.4 Procedure
4 Measuring the starting pressure
      4.1 Concept
      4.2 Procedure
5 Measuring the magnetic stray field
6 Measuring the power input
7 Checking the connecting dimensions
8 Checking the mass
9 Test report

Applies to sputter ion pumps 1) (hereinafter briefly referred to as pumps) with a nominal volume flow rate greater than 10l.s-1 and with the pressure range for the determination of the volume flow rate lying between 1,5.10-5 mbar and 1.10-9 mbar.

DocumentType	Standard
Pages	13
PublisherName	German Institute for Standardisation (Deutsches Institut für Normung)
Status	Current

DIN 28400-7:1978-07	VACUUM TECHNOLOGY; TERMS AND DEFINITIONS, VACUUM METALLURGY
DIN 28401:2008-03	Vacuum technology - Graphical symbols - Summary
DIN 28428:1978-11	Vacuum technology; acceptance specifications for turbomolecular pumps

DIN 28400-1:1990-05	VACUUM TECHNOLOGY - TERMS AND DEFINITIONS - GENERAL TERMS
ISO 21360-1:2012	Vacuum technology Standard methods for measuring vacuum-pump performance Part 1: General description
DIN 28400-2:1980-10	VACUUM TECHNOLOGY; TERMS AND DEFINITIONS, VACUUM PUMPS

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DIN 28429:2014-05

Current

Table of Contents

Abstract

General Product Information

Standards Referenced By This Book

Standards Referencing This Book

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