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DIN 50451-2:2003-04

Withdrawn
Withdrawn

A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

Determination of trace elements in liquids for use in semiconductor technology - Part 2: Determination of calcium, chromium, cobalt, copper, iron, nickel and zinc in hydrofluoric acid by plasma emission spectroscopy
Available format(s)

Hardcopy , PDF

Withdrawn date

10-02-2023

Language(s)

English, German

Published date

04-01-2003

Foreword
1 Scope
2 Normative references
3 Concept
4 Unit
5 Principle
6 Reagents
7 Apparatus and cleaning
8 Sampling
9 Sample pretreatment
10 Preparation of blank solutions
11 Procedure
12 Calculation and expression of results
13 Precision
14 Test report

The method described serves to examine, by plasma-induced (ICP or DCP) spectrometry, hydrofluoric acid for the presence of cobalt (Co), chromium (Cr), copper (Cu) and iron (Fe) and nickel (Ni) in amounts of 1 to 1000 ng/g. The presence of these metals is of relevance in the field of semi-conductor technology.

DocumentType
Standard
Pages
4
PublisherName
German Institute for Standardisation (Deutsches Institut für Normung)
Status
Withdrawn
Supersedes

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DIN 51401-1:2001-12 ATOMIC ABSORPTION SPECTROMETRY (AAS) - PART 1: TERMS
ISO 1042:1998 Laboratory glassware One-mark volumetric flasks
DIN 51008-2:2001-12 OPTICAL EMISSION SPECTROMETRY (OES) - PART 2: TERMS FOR FLAME AND PLASMA SYSTEMS
DIN 8120-1:1981-07 WEIGHING MACHINES; TERMS AND DEFINITIONS
DIN 32645:2008-11 CHEMICAL ANALYSIS - DECISION LIMIT, DETECTION LIMIT AND DETERMINATION LIMIT UNDER REPEATABILITY CONDITIONS - TERMS, METHODS, EVALUATION
ISO 8655-2:2002 Piston-operated volumetric apparatus Part 2: Piston pipettes
ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
ISO 3696:1987 Water for analytical laboratory use — Specification and test methods

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