IEST RP CC024.1 : 1994
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
MEASURING AND REPORTING VIBRATION IN MICROELECTRONIC FACILITIES
04-15-2024
01-12-2013
Equipment used in the manufacture, measurement, and inspection of integrated circuits is sensitive to vibration and sound. It is therefore necessary to establish levels of vibration sensitivity for them and to ensure that vibrations occurring near the facility or at the site at which they are located are below those levels. This Recommended Practice is intended to provide guidance for use in the microelectronics industry. However it may also be applicable in pharmaceutical and biological research metrology laboratories and other contexts in which vibration control is important.
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