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IEST RP CC028.1 : 2002

Current
Current

The latest, up-to-date edition.

Available format(s)

Hardcopy

Language(s)

English

Published date

01-12-2013

Publisher

Institute of Environmental Sciences and Technology

Gives a framework for describing minienvironments for microelectronics and similar applications. It is intended to stimulate discussion of specifications and configurations for a specified application between the supplier and customer.

DocumentType
Standard
Pages
0
PublisherName
Institute of Environmental Sciences and Technology
Status
Current

ISO 14644-7:2004 Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
16/30295652 DC : 0 BS EN ISO 14644-15 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 15: ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT AND MATERIALS BY AIRBORNE CHEMICAL AND SURFACE CHEMICAL CONCENTRATION
BS EN ISO 14644-15:2017 Cleanrooms and associated controlled environments Assessment of suitability for use of equipment and materials by airborne chemical concentration
UNE-EN ISO 14644-14:2017 Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016)
14/30280736 DC : 0 BS EN ISO 14644-14 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 14 ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT BY AIRBORNE PARTICLE CONCENTRATION
ISO 14644-14:2016 Cleanrooms and associated controlled environments Part 14: Assessment of suitability for use of equipment by airborne particle concentration
EN ISO 14644-14:2016 Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016)
EN ISO 14644-15:2017 Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2017)
BS EN ISO 14644-14:2016 ENISO 14644-14 environments — Assessment of suitability of equipment and materials for cleanrooms Assessment of suitability for use of equipment by airborne particle concentration
ISO 14644-15:2017 Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
I.S. EN ISO 14644-14:2016 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 14: ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT BY AIRBORNE PARTICLE CONCENTRATION (ISO/DIS 14644-14)
I.S. EN ISO 14644-15:2017 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 15: ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT AND MATERIALS BY AIRBORNE CHEMICAL CONCENTRATION (ISO 14644-15:2017)

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Hardcopy - English

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