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JIS B 9920:2002

Withdrawn
Withdrawn

A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

Classification of air cleanliness for cleanrooms
Available format(s)

Hardcopy , PDF

Withdrawn date

03-20-2019

Language(s)

Japanese, English

Published date

09-20-2002

Publisher

Japanese Standards Association

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This Standard specifies the classification of air cleanliness in cleanrooms and associated controlled environments exclusively in terms of concentration of airborne particles, and its evaluation method. Only particle populations having cumulative distributions based on threshold (lower limit) sizes ranging from 0.1 mum to 5 mum are considered for classification purposes. However, concentrations of ultrafine particles (particles smaller than 0.1 mum) and macroparticles (particles larger than 5 mum) may be used to quantify these populations in terms of U descriptors and M descriptors, respectively. This classification shall not be used in order to characterize a physical and chemical nature of airborne particles. Furthermore, the relation between the particle size and maximum permitted concentration specified in this Standard are intended for classifying, and do not express the actual particle size distribution.

DocumentType
Standard
Pages
0
PublisherName
Japanese Standards Association
Status
Withdrawn
Supersedes

Reaffirmed 2013 2002(R2013) [21/10/2013]2002(R2008) [01/10/2008]2002 [20/09/2002]1989 [01/11/1989]1975

JIS Z 8122:2000 Glossary Of Terms For Contamination Control
JIS Z 8101-1:1999 Statistics - Vocabulary and symbols Part 1: Probability and general statistical terms

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JIS B 9918-2:2008 Cleanrooms and associated controlled environments -- Biocontamination control -- Part 2: Evaluation and interpretation of biocontamination data
JIS B 9927:1999 Cleanroom - Air Filters - Test Methods
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JIS K 3836:1995 Testing methods for collection efficiency of airborne microbe samplers
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JIS K 8008:1992 General rules for biochemical reagents
JIS K 1466:1995 Testing Methods Of Hydrofluoric Acid For Semi-conductor
JIS B 9928:1998 Methods Of Aerosol Generation For Contamination Control
JIS K 0555:1995 Testing methods for determination of silica in highly purified water
JIS K 3605:1992 General rules for autoclaving
JIS K 0230:2007 Determination And Classification Of Purified Water Cleanliness
JIS B 9918-1:2008 Cleanrooms and associated controlled environments - Biocontamination control Part 1: General principles and methods
JIS K 0553:2002 Testing methods for determination of metallic elements in highly purified water

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Hardcopy - Japanese
Hardcopy - English
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