PREN ISO 14644-9 : DRAFT 2008
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 9: CLASSIFICATION OF SURFACE PARTICLE CLEANLINESS
08-01-2012
01-12-2013
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Abbreviated terms
5 Classification system
6 Demonstration of compliance
Annex A (informative) - Descriptor for specific particle
size ranges
Annex B (informative) - Parameters influencing the SPC
classification
Annex C (informative) - Surface characteristics
Annex D (informative) - Measurement methods for testing
surface particle cleanliness
Bibliography
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.