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SEMI C63 : 2008

Superseded
Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

SPECIFICATION FOR ORGANOSILICATE PRECURSORS USED IN LOW K CVD PROCESSES
Superseded date

11-06-2018

Published date

01-12-2013

Provides guidelines for organosilicate precursors used in Low K CVD processes and to standardize testing procedures to support those requirements.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. Also available in CD-ROM. (10/2007)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI C1 : 2010 GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS

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