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SEMI E14 : 1993

Withdrawn
Withdrawn

A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

MEASUREMENT OF PARTICLE CONTAMINATION CONTRIBUTED TO THE PRODUCT FROM THE PROCESS OR SUPPORT TOOL
Withdrawn date

03-01-2003

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Covers, procedures, methods and application of a technique for the determination of average particle numbers added to a wafer when the wafer is passed through a semiconductor process tool. Providing a standardized methodology and procedure for the measurement of contamination performance of a particular tool or process in terms of the number and size distribution of particles added to a silicon wafer resulting from being passed through the process tool.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Withdrawn

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