SEMI M46 : 2001E(R2015)
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR MEASURING CARRIER CONCENTRATIONS IN EPITAXIAL LAYER STRUCTURES BY ECV PROFILING
Published date
01-12-2013
States a method to measure the carrier concentration and carrier concentration vs. depth profile of epitaxial layers by Electrochemical Capacitance Voltage ECV profiling and test method covers a procedure for measuring the carrier concentration of epitaxial layers by ECV profiling.
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