SEMI MF1451:2007(R2019)

Name: SEMI MF1451:2007(R2019)
Brand: SEMI
Price: 150.00 USD

Superseded

TEST METHOD FOR MEASURING SORI ON SILICON WAFERS BY AUTOMATED NON-CONTACT SCANNING

Available format(s)

Hardcopy

Superseded date

06-07-2021

Language(s)

English

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes a non-contacting, nondestructive procedure to determine the sori of clean, dry semiconductor wafers.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (11/2003) Also available in CD-ROM. (06/2007)
DocumentType	Test Method
Pages	0
PublisherName	Semiconductor Equipment & Materials Institute
Status	Superseded
SupersededBy	SEMI MF1451 : 2007(R2021)

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