SEMI MF1982 : 2017
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR ANALYZING ORGANIC CONTAMINANTS ON SILICON WAFER SURFACES BY THERMAL DESORPTION GAS CHROMATOGRAPHY
Published date
01-12-2013
Contains the identification and quantification of organic compounds on wafer surfaces by using gas chromatography mass spectrometry (GC-MS).
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