Name: SEMI P35 : 2006(R2013)
Brand: SEMI

TERMINOLOGY FOR MICROLITHOGRAPHY METROLOGY

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes a consistent terminology for the understanding and discussion of metrology issues important to microlithography.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (11/2006)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

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