Name: SEMI S22 : 2015BE
Brand: SEMI

Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

1. Purpose
2. Scope
3. Limitations
4. Reference Standards and Documents
5. Terminology
6. Alternate Methods of Conformity
7. Design Philosophy
8. General Considerations
9. Facilities Electrical Connection
10. Protection Against Electric Shock or Burn
11. Protection Against Risk of Electrical Fire
12. Bonding to the Protective Conductor
13. Safety Circuits
14. Interface Control
15. Electrical Enclosures
16. Conductors and Cables
17. Wiring Practices
18. Electric Motors 1/4 Horsepower and Larger
19. Accessories and Lighting
20. Markings
21. Technical Documentation
22. Testing

Specifies a set of design based electrical safety considerations for production equipment used in the semiconductor industry.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (10/2003) E = This standard was editorially modified in October 2017 to correct editorial errors. (10/2017)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current
SupersededBy	SEMI S22:2018

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