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Cleanrooms and associated controlled environments Test methods

Available format(s)

Hardcopy , PDF 1 User , PDF 3 Users , PDF 5 Users , PDF 9 Users

Language(s)

English

Published date

05-21-2021

Publisher

Standards Australia

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Identically adopts ISO 14644 3:2019, which provides test methods in support of the operation for cleanrooms and clean zones to meet air cleanliness classification, other cleanliness attributes and related controlled conditions. KEYWORDS: Cleanrooms; Controlled environments; Attributes; Test method

Committee	ME-060
DocumentType	Standard
ISBN	978 1 76113 321 3
Pages	53
PublisherName	Standards Australia
Status	Current
Supersedes	DR AS ISO 14644.3:2020 AS/NZS 14644.3:2009

Standards	Relationship
ISO 14644-3:2019	Identical

Originated in Australia as part of AS 1386-1976 and AS 1387-1976. Jointly revised, amalgamated and redesignated as AS/NZS 14644.3:2009. Revised and redesignated as AS ISO 14644.3:2021.