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ASTM D 5544 : 2016 : REDLINE

Current
Current

The latest, up-to-date edition.

Standard Test Method for On-Line Measurement of Residue After Evaporation of High-Purity Water
Available format(s)

PDF

Language(s)

English

Published date

07-14-2016

Publisher

American Society for Testing and Materials

CONTAINED IN VOL. 11.01, 2017 Defines the determination of dissolved organic and inorganic matter and colloidal material found in high purity water used in the semiconductor, aerospace, and other industries.

1.1This test method covers the determination of dissolved organic and inorganic matter and colloidal material found in high-purity water used in the semiconductor, and related industries. This material is referred to as residue after evaporation (RAE). The range of the test method is from 0.001 μg/L (ppb) to 60 μg/L (ppb).

1.2This test method uses a continuous, real time monitoring technique to measure the concentration of RAE. A pressurized sample of high-purity water is supplied to the test method's apparatus continuously through ultra-clean fittings and tubing. Contaminants from the atmosphere are therefore prevented from entering the sample. General information on the test method and a literature review on the continuous measurement of RAE has been published.2

1.3The values stated in SI units are to be regarded as standard. The values given in parentheses are mathematical conversions to inch-pound units that are provided for information only and are not considered standard.

1.4This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. For specific hazards statements, see Section 8.

Committee
D 19
DocumentType
Redline
Pages
9
PublisherName
American Society for Testing and Materials
Status
Current

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ASTM D 2777 : 2013 : REDLINE Standard Practice for Determination of Precision and Bias of Applicable Test Methods of Committee D19 on Water
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