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ASTM E 2530 : 2006

Withdrawn
Withdrawn

A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

Standard Practice for Calibrating the Z-Magnification of an Atomic Force Microscope at Subnanometer Displacement Levels Using Si(111) Monatomic Steps (Withdrawn 2015)
Available format(s)

Hardcopy , PDF

Withdrawn date

01-31-2015

Language(s)

English

Published date

11-01-2006

Publisher

American Society for Testing and Materials

CONTAINED IN VOL. 03.06, 2014 Covers a measurement procedure to calibrate the z-scale of an atomic force microscope using Si(111) monatomic step height specimens.

1.1 This practice covers a measurement procedure to calibrate the z-scale of an atomic force microscope using Si(111) monatomic step height specimens.

1.2 Applications This procedure is applicable either in ambient or vacuum condition when the atomic force microscope (AFM) is operated at its highest levels of z-magnification, that is, in the nanometer and sub-nanometer ranges of z-displacement. These ranges of measurement are required when the AFM is used to measure the surfaces of semiconductors, optical surfaces, and other high technology components.

1.3 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only.

1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Committee
E 42
DocumentType
Standard Practice
Pages
6
PublisherName
American Society for Testing and Materials
Status
Withdrawn

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