ASTM F 576 : 2001
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Standard Test Method for Measurement of Insulator Thickness and Refractive Index on Silicon Substrates by Ellipsometry (Withdrawn 2003)
Hardcopy , PDF
11-05-2013
English
06-10-2001
CONTAINED IN VOL. 10.05, 2001 Measures by ellipsometry thickness and refractive index of insulator grown or deposited on silicon substrate, using monochromatic light.
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