ASTM F 671 : 1999
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Standard Test Method for Measuring Flat Length on Wafers of Silicon and Other Electronic Materials (Withdrawn 2003)
Hardcopy , PDF
11-05-2013
English
12-10-1999
CONTAINED IN VOL. 10.05, 2001 Deals with techniques for determining length of the flatted portion of a wafer periphery. Primarily for use on electronic materials in nominally circular edge-contoured wafer form with flat lengths not exceeding 65 mm.
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