• There are no items in your cart

ASTM F 804 : 1983 : R1990 : EDT 1

Withdrawn
Withdrawn

A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

Practice for Producing Spin Coating Resist Thickness Curves (Withdrawn 1997)
Available format(s)

Hardcopy , PDF

Withdrawn date

12-31-1997

Language(s)

English

Published date

12-31-2010

CONTAINED IN VOL 10.05 1997 Gives method for producing spin coating thickness curves for radiation-sensitive resists on substrates, wafers, and mask blanks. Applies to thicknesses from submicrometre to several micrometres.

Committee
F 01
DocumentType
Standard Practice
Pages
3
ProductNote
cr NOTE-Test Method F 907 added to Referenced Document section editoriallv in Julv 1991.
PublisherName
American Society for Testing and Materials
Status
Withdrawn

ASTM F 127 : 1984 Definitions of Terms Relating to Relating to Photomasking Technology for Microelectronics (Withdrawn 1992)
FED-STD-209 Revision E:1992 AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES
ASTM F 66 : 1984 : R1990 Test Methods for Testing Photoresists Used in Microelectronic Fabrication (Withdrawn 1996)

View more information
US$66.00
Excluding Tax where applicable

Access your standards online with a subscription

Features

  • Simple online access to standards, technical information and regulations.

  • Critical updates of standards and customisable alerts and notifications.

  • Multi-user online standards collection: secure, flexible and cost effective.