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ASTM F 863 : 1984 : R1992 : EDT 1

Withdrawn
Withdrawn

A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

Practice for Detection of Defects in Spin-Coated Resist (Withdrawn 1996)
Available format(s)

Hardcopy , PDF

Withdrawn date

01-01-1996

Language(s)

English

Published date

12-31-2010

Publisher

American Society for Testing and Materials

CONTAINED IN VOL 10.05 1997 Detects defects in spin-coated resist on clear substrates used in the evaluation and process control of spin-coating resist systems.

Committee
ASTM
DocumentType
Standard Practice
Pages
2
ProductNote
et NOTE-Editorial changes were made throughout in February 1992.
PublisherName
American Society for Testing and Materials
Status
Withdrawn

FED-STD-209 Revision E:1992 AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES

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Hardcopy - English
PDF - English
Hardcopy - English
PDF - English
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