ASTM F 864 : 1984 : R1992
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Hardcopy , PDF
01-01-1996
English
12-31-2010
CONTAINED IN VOL 10.05 1997 Describes inspection of hard-surface glass photoplates to produce photomasks for semiconductor and microelectronic device fabrication. Applies to hard photoplates without photoresist. Limited to detecting surface contamination, gross defects, surface scratches and pinholes. Subjective, depends upon equipment used, types and sizes of defects and observer's judgement.
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