ENISO 14644-14 environments — Assessment of suitability of equipment and materials for cleanrooms Assessment of suitability for use of equipment by airborne particle concentration

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

10-31-2016

Publisher

British Standards Institution

This part of ISO14644 specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO14644-1. Particle sizes range from 0,1µm to equal to or larger than 5µm (given in ISO14644-1).

NOTE Where regulatory agencies impose supplementary guidelines or restrictions, appropriate adaptation of the assessment methodology can be required.

The following items are not covered by this part of ISO14644:

assessment of suitability with respect to biocontamination;
testing for suitability of decontamination agents and techniques;
cleanability of equipment and materials;
requirements on design of equipment and selection of materials;
physical properties of materials (e.g. electrostatic, thermal properties);
optimizing performance of equipment for specific process applications;
selection and use of statistical methods for testing;
protocols and requirements for local safety regulations.

Committee	LBI/30
DevelopmentNote	Supersedes 14/30280736 DC. (10/2016)
DocumentType	Standard
Pages	32
PublisherName	British Standards Institution
Status	Current
Supersedes	14/30280736 DC : 0

Standards	Relationship
ISO 14644-14:2016	Identical
EN ISO 14644-14:2016	Identical

SAE AIR1167:1970	ENVIRONMENTAL CRITERIA AND TESTS FOR AEROSPACE GROUND EQUIPMENT IN SUPPORT OF SPACE SYSTEMS
SEMI E49 : 2017	GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES
IEST RP CC026.2 : 2004	CLEANROOM OPERATIONS
ISO 8573-8:2004	Compressed air — Part 8: Test methods for solid particle content by mass concentration
SEMI F70 : 2011(R2017)	TEST METHOD FOR DETERMINATION OF PARTICLE CONTRIBUTION OF GAS DELIVERY SYSTEM
ISO 14644-3:2005	Cleanrooms and associated controlled environments Part 3: Test methods
ISO 14644-7:2004	Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
ISO 14644-1:2015	Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
VDI 2083 Blatt 9.1:2006-12	Clean room technology - Compatibility with required cleanliness and surface cleanliness
IEST RP CC013.3 : 2012	CALIBRATION PROCEDURES AND GUIDELINES FOR SELECT EQUIPMENT USED IN TESTING CLEANROOMS AND OTHER CONTROLLED ENVIRONMENTS
ISO 14644-9:2012	Cleanrooms and associated controlled environments Part 9: Classification of surface cleanliness by particle concentration
SEMI F28 : 2003(R2015)	TEST METHOD FOR MEASURING PARTICLE GENERATION FROM PROCESS PANELS
IEST RP CC028.1 : 2002