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BS IEC 62047-30:2017

BS IEC 62047-30:2017

Current

Current

The latest, up-to-date edition.

Semiconductor devices. Micro-electromechanical devices Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

10-09-2017

Publisher

British Standards Institution

FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Test bed of MEMS piezoelectric thin film
5 Thin film under testing
6 Test report
Annex A (informative) - Example of measuring method
        of MEMS piezoelectric thin film
Bibliography

Describes measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices.

This part of IEC 62047 specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films fabricated by MEMS process.

Committee
EPL/47
DevelopmentNote
Supersedes 16/30338636 DC. (10/2017)
DocumentType
Standard
Pages
24
PublisherName
British Standards Institution
Status
Current

Standards Relationship
IEC 62047-30:2017 Identical

EN 50324-2:2002 Piezoelectric properties of ceramic materials and components - Part 2: Methods of measurement - Low power
IEC 60483:1976 Guide to dynamic measurements of piezoelectric ceramics with high electromechanical coupling

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Hardcopy - English
PDF - English
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