Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth profiling of boron in silicon

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

09-30-2014

Publisher

British Standards Institution

Foreword
Introduction
1 Scope
2 Normative reference
3 Symbols and abbreviations
4 Principle
5 Reference materials
6 Apparatus
7 Specimen
8 Procedure
9 Expression of results
10 Test report
Annex A (informative) - Statistical report of stylus
profilometry measurements
Bibliography

Defines a secondary-ion mass spectrometric method using magnetic-sector or quadrupole mass spectrometers for depth profiling of boron in silicon, and using stylus profilometry or optical interferometry for depth scale calibration.

This International Standard specifies a secondary-ion mass spectrometric method using magnetic-sector or quadrupole mass spectrometers for depth profiling of boron in silicon, and using stylus profilometry or optical interferometry for depth scale calibration. This method is applicable to single-crystal, poly-crystal, or amorphous silicon specimens with boron atomic concentrations between 1×10¹⁶atoms/cm³ and 1×10²⁰atoms/cm³, and to crater depths of 50nm or deeper.

Committee	CII/60
DevelopmentNote	Supersedes 99/124265 DC. (09/2002) Supersedes 14/30296416 DC. (09/2014)
DocumentType	Standard
Pages	22
PublisherName	British Standards Institution
Status	Current
Supersedes	99/124265 DC : DRAFT DEC 1999 BS ISO 17560:2002 14/30296416 DC : 0

Standards	Relationship
ISO 17560:2014	Identical

ISO 14237:2010	Surface chemical analysis Secondary-ion mass spectrometry Determination of boron atomic concentration in silicon using uniformly doped materials
ISO 5725-2:1994	Accuracy (trueness and precision) of measurement methods and results Part 2: Basic method for the determination of repeatability and reproducibility of a standard measurement method

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BS ISO 17560:2014

Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth profiling of boron in silicon

Table of Contents

Abstract

Scope

General Product Information

International Equivalents

Standards Referencing This Book

Category

Subcategory