BS ISO 18516:2006

Foreword
Introduction
1 Scope
2 Normative references
3 Terms, definitions, symbols and abbreviated terms
  3.1 Terms and definitions
  3.2 Symbols and abbreviated terms
4 General information
  4.1 Background information
  4.2 Measurement of lateral resolution in AES and XPS
  4.3 Dependence of lateral resolution on scan direction
  4.4 Methods for the measurement of lateral resolution
      in AES and XPS
5 Measurement of lateral resolution with the straight-edge
  method
  5.1 Introduction
  5.2 Variants of the straight-edge method
  5.3 Selection of the straight-edge specimen
  5.4 Mounting the straight-edge specimen
  5.5 Cleaning the straight-edge specimen
  5.6 Operating the instrument
  5.7 Data collection
  5.8 Data analysis
6 Measurement of lateral resolution with the grid method
  6.1 Introduction
  6.2 Selection of the grid specimen
  6.3 Mounting the grid specimen
  6.4 Cleaning the grid specimen
  6.5 Operating the instrument
  6.6 Data collection
  6.7 Data analysis
7 Measurement of lateral resolution with the gold-island
  method
  7.1 Introduction
  7.2 Selection of the gold-island specimen
  7.3 Mounting the gold-island specimen
  7.4 Cleaning the gold-island specimen
  7.5 Operating the instrument
  7.6 Data collection
  7.7 Data analysis
Annex A (informative) Determination of lateral resolution
        of an XPS instrument with a focused X-ray spot
Annex B (informative) Determination of lateral resolution
        from a secondary-electron line scan
Annex C (informative) Determination of lateral resolution
        from Auger-electron line scans
Bibliography