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BS ISO 20341:2003

Current
Current

The latest, up-to-date edition.

Surface chemical analysis. Secondary-ion mass spectrometry. Method for estimating depth resolution parameters with multiple delta-layer reference materials
Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

08-08-2003

Publisher

British Standards Institution

1 Scope
2 Normative references
3 Symbols
4 Requirements for multiple delta-layer reference materials
5 Procedures
6 Test report
Annex A (normative) Simpler options of estimating SIMS depth
        resolution parameters
Bibliography

Gives procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.

This part of ISO3262 specifies the requirements and the corresponding methods of test for natural quartz (ground).

Committee
CII/60
DevelopmentNote
Supersedes 02/122923 DC (08/2003) Reviewed and confirmed by BSI, January 2010. (12/2009)
DocumentType
Standard
Pages
14
PublisherName
British Standards Institution
Status
Current
Supersedes

Standards Relationship
ISO 20341:2003 Identical

ISO 18115:2001 Surface chemical analysis Vocabulary

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Hardcopy - English
PDF - English
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