SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 6: AXIAL FATIGUE TESTING METHODS OF THIN FILM MATERIALS

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

01-01-2011

Publisher

Comitato Elettrotecnico Italiano

FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Test piece
5 Testing method and test apparatus
6 Endurances (test termination)
7 Test report
Annex A (informative) - Technical background of
        this standard
Annex B (informative) - Test piece
Annex C (informative) - Displacement measurement
Annex D (informative) - Testing environment
Annex E (informative) - Number of test pieces
Bibliography
Annex ZA (normative) - Normative references to
         international publications with their
         corresponding European publications

Describes the method for axial tensile-tensile force fatigue testing of thin film materials with a length and width under 1 mm and a thickness in the range between 0,1 [mu]m and 10 [mu]m under constant force range or constant displacement range.

Committee	CT 309
DevelopmentNote	Classificazione CEI 47-71. (05/2011)
DocumentType	Standard
Pages	22
PublisherName	Comitato Elettrotecnico Italiano
Status	Current

Standards	Relationship
EN 62047-6:2010	Identical
IEC 62047-6:2009	Identical

ASTM E 466 : 2015 : REDLINE	Standard Practice for Conducting Force Controlled Constant Amplitude Axial Fatigue Tests of Metallic Materials
IEC 62047-2:2006	Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials
EN 62047-2:2006	Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials
ISO 1099:2017	Metallic materials — Fatigue testing — Axial force-controlled method
ISO 12107:2012	Metallic materials — Fatigue testing — Statistical planning and analysis of data

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CEI EN 62047-6 : 2011

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Table of Contents

Abstract

General Product Information

International Equivalents

Standards Referencing This Book

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