• There are no items in your cart

CGA G-13 : 2016

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by
superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

STORAGE AND HANDLING OF SILANE AND SILANE MIXTURES

Available format(s)

Hardcopy

Superseded date

04-06-2023

Language(s)

English

Published date

08-01-2016

1 Introduction
2 Scope and purpose
3 Definitions
4 Physical and chemical properties
5 Packaging information
6 Outdoor storage and use
7 Indoor storage and use
8 System configuration - cylinder sources
9 System configuration - bulk sources
10 Piping and components
11 Gas and flame detection
12 Fire protection system
13 Ventilation systems
14 Venting and treatment
15 Purge gas system
16 Electrical requirements
17 Fundamental supervisory control requirements
18 Container filling
19 References
20 Additional references
Appendices
Appendix A - Personnel protection (Informative)
Appendix B - Explanatory material (Informative)
Appendix C - Thermal radiation (Normative)
Appendix D - Guidance on overpressure based separation
             distances for bulk silane storage or use (Normative)

Describes the installation of systems and sources that are used to store, transfer, or contain silane or silane mixtures.

DevelopmentNote
Supersedes CGA P 32 (03/2006)
DocumentType
Standard
Pages
0
PublisherName
Compressed Gas Association
Status
Superseded
SupersededBy
Supersedes

NFPA 318 : 2018 PROTECTION OF SEMICONDUCTOR FABRICATION FACILITIES

View more information
US$264.00
Excluding Tax where applicable

Access your standards online with a subscription

Features

  • Simple online access to standards, technical information and regulations.

  • Critical updates of standards and customisable alerts and notifications.

  • Multi-user online standards collection: secure, flexible and cost effective.