DD ISO/TR 15969:2001
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Hardcopy , PDF
03-26-2021
English
10-01-2001
Foreword
1 Scope
2 Terms and definitions
3 Abbreviated terms
4 Methods of determination of the sputtered depth
4.1 Crater depth measurement after sputter profiling
4.2 Comparison with sputter profiled samples having
interfaces as depth markers
4.3 Typical applications and uncertainties of the
different methods
Annex A Survey of typical applications and uncertainties
of the different methods
Bibliography
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