DIN EN 62047-1:2014-05 (Draft)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 1: TERMS AND DEFINITIONS (IEC 62047-1:2016)
Available format(s)
Hardcopy , PDF
Superseded date
03-07-2021
Language(s)
German
Published date
01-01-2014
| DevelopmentNote |
Supersedes DIN IEC 62047-1. (10/2006)
|
| DocumentType |
Draft
|
| Pages |
59
|
| PublisherName |
German Institute for Standardisation (Deutsches Institut für Normung)
|
| Status |
Superseded
|
| Supersedes |
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