CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 13: CLEANING OF SURFACES TO ACHIEVE DEFINED LEVELS OF CLEANLINESS IN TERMS OF PARTICLE AND CHEMICAL CLASSIFICATIONS (ISO 14644-13:2017)

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

01-01-2017

Publisher

German Institute for Standardisation (Deutsches Institut für Normung)

National foreword
National Annex NA (informative) - Bibliography
European foreword
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 General methodology
5 Object description
6 Cleanliness specifications
7 Determination of initial contamination level
8 Other requirements
9 Selection of a cleaning methodology
10 Material compatibility check
11 Cleaning validation
12 Measurement methods
13 Documentation
Annex A (informative) - Aspects of cleaning
Annex B (informative) - Cleaning methods
Annex C (informative) - Material compatibility with
cleaning agents
Annex D (informative) - Cleanliness measurement
Bibliography

Provides guidelines for cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom.

DocumentType	Standard
Pages	42
PublisherName	German Institute for Standardisation (Deutsches Institut für Normung)
Status	Current

Standards	Relationship
EN ISO 14644-13:2017	Identical
ISO 14644-13:2017	Identical

ISO 14644-8:2013	Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC)
ASTM G 122 : 1996	Standard Test Method for Evaluating the Effectiveness of Cleaning Agents
ISO 14644-1:2015	Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
SAE AMS 03-2 : 2017	CLEANING AND PREPARATION OF METAL SURFACES
ISO 14644-9:2012	Cleanrooms and associated controlled environments Part 9: Classification of surface cleanliness by particle concentration

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DIN EN ISO 14644-13 E : 2017

CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 13: CLEANING OF SURFACES TO ACHIEVE DEFINED LEVELS OF CLEANLINESS IN TERMS OF PARTICLE AND CHEMICAL CLASSIFICATIONS (ISO 14644-13:2017)

Table of Contents

Abstract

General Product Information

International Equivalents

Standards Referencing This Book

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