DIN ISO 18516:2020-11
Current
Current
The latest, up-to-date edition.
Surface chemical analysis – Determination of lateral resolution and sharpness in beam based methods with a range from nanometers to micrometers (ISO 18516:2019); Text in English
Available format(s)
Hardcopy , PDF
Language(s)
English
Published date
11-01-2020
This document describes methods for measuring lateral resolution and sharpness in imaging surface chemical analysis.
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