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DIN ISO 18516:2020-11

Current

Current

The latest, up-to-date edition.

Surface chemical analysis – Determination of lateral resolution and sharpness in beam based methods with a range from nanometers to micrometers (ISO 18516:2019); Text in English

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

11-01-2020

This document describes methods for measuring lateral resolution and sharpness in imaging surface chemical analysis.

Committee
TC 201
DocumentType
Standard
Pages
0
PublisherName
German Institute for Standardisation (Deutsches Institut für Normung)
Status
Current

Standards Relationship
ISO 18516:2019 Identical

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