DIN V VDE V 0126-18-2-2 : 2007
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
SOLAR WAFERS - PART 2-2: MEASURING THE GEOMETRIC DIMENSIONS OF SILICON WAFERS - VARIATIONS IN THICKNESS
12-01-2009
01-12-2013
Das Verfahren nach dieser Norm dient dazu, die Dickenvariation (TTVPV) von kristallinen Siliciumscheiben zu bestimmen, wobei sowohl berührungsfreie als auch berührend arbeitende Dickenmessgräte verwendet werden können.
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