EN ISO 14644-15:2017
Current
The latest, up-to-date edition.
Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2017)
12-06-2017
European foreword
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols
5 Test setup
6 Representative mode
7 Visual inspection
8 Test description
9 Calculation of the measured concentrations
10 Calculation of specific emission rate
11 Assessment
12 Documentation
Annex A (informative) - Example calculation for
suitability assessment of one equipment
(existing installation)
Annex B (informative) - Example calculation for
suitability assessment of wall material
(existing cleanroom/clean zone installation)
Annex C (informative) - Suitability assessment of a
combination of equipment and floor
material in a cleanroom to be designed
Bibliography
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