• FED STD 209 : E

    Superseded A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
    Add to Watchlist
    This Standard has been added successfully to your Watchlist.
    Please visit My Watchlist to see all standards that you are watching.
    Please log in or to add this standard to your Watchlist.
    We could not add this standard to your Watchlist.
    Please retry or contact support for assistance.
    We could not add this standard to your Watchlist.
    Please retry or contact support for assistance.
    You have already added this standard to your Watchlist.
    Visit My Watchlist to view the full list.

    AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES

    Available format(s):  Hardcopy, PDF

    Superseded date:  11-29-2001

    Language(s): 

    Published date: 

    Publisher:  US Military Specs/Standards/Handbooks

    Add to Watchlist

    Add To Cart

    Table of Contents - (Show below) - (Hide below)

    1 Scope and limitations
    1.1 Scope
    1.2 Limitations
    2 Referenced documents
    3 Definitions
    3.1 Airborne particulate cleanliness class
    3.2 Anisokinetic sampling
    3.3 Calibration
    3.4 Clean zone
    3.5 Cleanroom
    3.5.1 As-built cleanroom (facility)
    3.5.2 At-rest cleanroom (facility)
    3.5.3 Operational cleanroom (facility)
    3.6 Condensation nucleus counter (CNC)
    3.7 Discrete-particle counter (DPC)
    3.8 Entrance plane
    3.9 Isoaxial
    3.10 Isokinetic sampling
    3.11 Monitoring
    3.12 Nonunidirectional airflow
    3.13 Particle
    3.14 Particle concentration
    3.15 Particle size
    3.16 Student's t statistic
    3.17 U descriptor
    3.18 Ultrafine particles
    3.19 Unidirectional airflow
    3.20 Upper confidence limit (UCL)
    3.21 Verification
    4 Airborne particulate cleanliness classes and
               U descriptors
    4.1 Class listed in Table I
    4.1.1 Measurement at particle sizes listed in Table
               I
    4.1.2 Measurement at alternative particle sizes
    4.2 Provision for defining alternative airborne
               particulate cleanliness classes
               Table I. Airborne particulate cleanliness
               classes
    4.3 Provision for describing ultrafine particle
               concentrations (U descriptors)
    4.4 Nomenclature for airborne particle
               concentrations
    4.4.1 Format for airborne particulate cleanliness
               classes
    4.4.2 Format for U descriptors
    5 Verification and monitoring of airborne
               particulate cleanliness
    5.1 Verification of airborne particulate
               cleanliness
    5.1.1 Frequency
    5.1.2 Environmental test conditions
    5.1.2.1 State of cleanroom or clean zone during
               verification
    5.1.2.2 Environmental factors
    5.1.3 Particle counting
    5.1.3.1 Sample locations and number: unidirectional
               airflow
    5.1.3.2 Sample locations and number:
               nonunidirectional airflow
    5.1.3.3 Restrictions on sample locations
    5.1.3.4 Sample volume and sampling time
    5.1.3.4.1 Single sampling plan for classes in Table I
    5.1.3.4.2 Single sampling plan for alternative classes
               or particle sizes
    5.1.3.4.3 Single sampling plan for U descriptors
    5.1.3.4.4 Sequential sampling plan
    5.1.4 Interpretation of the data
    5.2 Monitoring of airborne particulate
               cleanliness
    5.2.1 Monitoring plan
    5.2.2 Particle counting for monitoring
    5.3 Methods and equipment for measuring airborne
               particle concentrations
    5.3.1 Counting particles 5 micrometers and larger
    5.3.2 Counting particles smaller than 5 micrometers
    5.3.3 Counting ultrafine particles
    5.3.4 Limitations of particle counting methods
    5.3.5 Calibration of particle counting
               instrumentation
    5.4 Statistical analysis
    5.4.1 Acceptance criteria for verification
    5.4.2 Calculations to determine acceptance
    5.4.2.1 Average particle concentration at a location
    5.4.2.2 Mean of the averages
    5.4.2.3 Standard deviation of the averages
    5.4.2.4 Standard error of the mean of the averages
    5.4.2.5 Upper confidence limit (UCL)
               Table II. UCL factor for 95% upper confidence
               limit
    5.4.2.6 Sample calculation
    6 Recommendation for changes
    7 Conflict with referenced documents
    8 Federal agency interests
    Appendix A - Counting and sizing airborne particles
                 using optical microscopy
    A10 Scope
    A20 Summary of the method
    A30 Equipment
    A40 Preparation of equipment
    A50 Sampling the air
    A60 Calibration of the microscope
    A70 Counting and sizing particles by optical
               microscopy
    A80 Reporting
    A90 Factors affecting precision and accuracy
    Appendix B - Operation of a discrete-particle counter
    B10 Scope and limitations
    B20 References
    B30 Summary of method
    B40 Apparatus and related documentation
    B50 Preparation for sampling
    B60 Sampling
    B70 Reporting
    Appendix C - Isokinetic and anisokinetic sampling
    C10 Scope
    C20 Reference
    C30 Background
    C40 Methods
               Figure C.1. Probe inlet diameters (metric
               units) for isokinetic sampling, v = vo
               Figure C.2. probe inlet diameters (English
               units) for isokinetic sampling, v = vo
               Figure C.3. Contours of sampling bias,
               c/co = 0.95, 1.05
    C50 Example
    Appendix D - Method for measuring the concentration of
                 ultrafine particles
    D10 Scope
    D20 References
    D30 Apparatus
               Figure D.1. Envelope of acceptability for the
               counting efficiency of a DPC used to verify
               the U descriptor
    D40 Determining the concentration of ultrafine
               particles
    Appendix E - Rationale for the statistical rules used in
                 FED-STD-209E
    E10 Scope
    E20 The statistical rules
    E30 Sequential sampling
    E40 Sample calculation to determine statistical
               validity of a verification
    Appendix F - Sequential sampling: an optional method for
                 verifying the compliance of air to the
                 limits of airborne particulate cleanliness
                 classes M 2.5 and cleaner
    F10 Scope
    F20 References
    F30 Background
    F40 Method
               Figure F.1. Observed count, C, vs. expected
               count, E, for sequential sampling
               Table F.1. Upper and lower limits for time at
               which C counts should arrive
    F50 Examples
    F60 Reporting
    Appendix G - Sources of supplemental information
    G10 Scope
    G20 Sources of supplemental information

    Abstract - (Show below) - (Hide below)

    Gives classes of air cleanliness for airborne particulate levels in cleanrooms and zones. Gives methods for class verification and monitoring of air cleanliness. Coverage includes: airborne particulate cleanliness classes and U descriptions; verification and monitoring of airborne particulate cleanliness. Also contains detailed definitions and appendices.

    General Product Information - (Show below) - (Hide below)

    Committee FSC 3694
    Development Note E Notice 1 - Notice of Cancellation/Superseded by ISO 14644-1 and ISO 14644-2 (03/2002)
    Document Type Standard
    Publisher US Military Specs/Standards/Handbooks
    Status Superseded
    Superseded By

    Standards Referenced By This Book - (Show below) - (Hide below)

    MIL G 23081 : C GYROSCOPE INDICATOR SYSTEM VERTICAL.
    MIL STD 1774 : 0 PROCESS FOR CLEANING HYDRAZINE SYSTEMS AND COMPONENTS
    ES 59008-5-2 : 2001 DATA REQUIREMENTS FOR SEMI-CONDUCTOR DIE - PART 5-2: PARTICULAR REQUIREMENTS AND RECOMMENDATIONS FOR DIE TYPES - BARE DIE WITH ADDED CONNECTION STRUCTURES
    ASTM F 1708 : 2002 Standard Practice for Evaluation of Granular Polysilicon by Meter-Zoner Spectroscopies (Withdrawn 2003)
    ANSI INCITS 200 : 1992 INFORMATION SYSTEMS - UNRECORDED OPTICAL MEDIA UNIT FOR DIGITAL INFORMATION INTERCHANGE - 356 MM WORM OPTICAL DISK CARTRIDGE - PARTS 1 AND 2
    MIL G 23083 : C GYROSCOPE, RATE SWITCHING MS 17399
    MIL S 85333 : 0 SAFETY ARMING DEVICE MARK 33 MOD 1
    MIL F 48863 : C FUZE, GUIDED MISSILE, M934E6 PARTS ASSEMBLY, LOADING & PACKING FOR
    I.S. EN 14736:2004 SPACE PRODUCT ASSURANCE - QUALITY ASSURANCE FOR TEST CENTRES
    ASTM F 416 : 1994 Test Method for Detection of Oxidation Induced Defects in Polished Silicon Wafers (Withdrawn 1998)
    NASA KSC SO S 9 : 1993 RETEST AND REFURBISHMENT OF COMPRESSED GAS TRAILERS AND MOVABLE STORAGE UNITS, STANDARD FOR
    ASTM F 691 : 1980 : R1991 : EDT 1 Practice for Preparing Photoplates for Measuring Flatness Deviation (Withdrawn 1996)
    MIL A 83577 : B ASSEMBLIES, MOVING MECHANICAL, FOR SPACE AND LAUNCH VEHICLES, GENERAL SPECIFICATION FOR
    MIL HDBK 337 : 0 ADHESIVE BONDED AEROSPACE STRUCTURE REPAIR
    DEFSTAN 18-1/2(1990) : 1990 GUIDELINES AND STANDARDS FOR THE PROCUREMENT OF MILITARY SPACECRAFT SYSTEMS
    CEI EN 62258-1 : 2011 SEMICONDUCTOR DIE PRODUCTS - PART 1: PROCUREMENT AND USE
    ASTM F 863 : 1984 : R1992 : EDT 1 Practice for Detection of Defects in Spin-Coated Resist (Withdrawn 1996)
    ASTM F 804 : 1983 : R1990 : EDT 1 Practice for Producing Spin Coating Resist Thickness Curves (Withdrawn 1997)
    MIL STD 1330 : D STANDARD PRACTICE FOR PRECISION CLEANING AND TESTING OF SHIPBOARD OXYGEN, HELIUM, HELIUM-OXYGEN, NITROGEN AND HYDROGEN SYSTEMS
    ASTM F 864 : 1984 : R1992 Practice for Inspection of Hardsurface Glass Photoplates (Withdrawn 1996)
    MIL H 38534 : B (1) HYBRID MICROCIRCUITS, GENERAL SPECIFICATION FOR
    ASTM F 890 : 1984 : R1992 Practice for Determining Pinhole Density in Photoresist Films Used in Microelectronic Device Processing (Withdrawn 1996)
    MIL B 197 : F INT AMD 2 BEARINGS, ANTIFRICTION, ASSOCIATED PARTS AND SUBASSEMBLIES, PREPARATION FOR DELIVERY OF
    MIL V 87223 : 0 VALVE, PRESSURE, ANTI-G SUIT, MXU-804/A AND MXU-805/A
    MIL STD 976 : B CERTIFICATION REQUIREMENTS FOR JAN MICROCIRCUITS
    ASTM E 2311 : 2004 Standard Practice for QCM Measurement of Spacecraft Molecular Contamination in Space
    MIL P 197 : H PACKAGING OF BEARINGS, ANTIFRICTION, ASSOCIATED PARTS AND SUBASSEMBLIES
    MIL H 26385 : E HOSE, OXYGEN AND PRESSURIZATION, OZONE RESISTANT
    MIL STD 1246 : C PRODUCT CLEANLINESS LEVELS AND CONTAMINATION CONTROL PROGRAM
    BS PD ES 59008-5.2 : 2001 DATA REQUIREMENTS FOR SEMICONDUCTOR DIE - PART 5-2: PARTICULAR REQUIREMENTS AND RECOMMENDATIONS FOR DIE TYPES - BARE DIE WITH ADDED CONNECTION STRUCTURES
    ASME B89.6.2 : 1973 : R2017 TEMPERATURE AND HUMIDITY ENVIRONMENT FOR DIMENSIONAL MEASUREMENT
    MIL H 26626 : D HOSE ASSEMBLY, TETRAFLUOROETHYLENE, OXYGEN
    BS EN 62258-1 : 2010 SEMICONDUCTOR DIE PRODUCTS - PART 1: PROCUREMENT AND USE
    MIL R 39023 : A RESISTOR, VARIABLE, NON WIRE WOUND, PRECISION GENERAL SPECIFICATION FOR
    MIL F 48388 : A FUZE, M934E6, LAUNCH SENSING SWITCH FOR
    MIL I 81454 : 0 INDICATOR, GYROSCOPE, VERTICAL REFERENCE ID-1481 (*)/A
    MIL STD 1547 : B ELECTRONIC PARTS, MATERIALS, AND PROCESSES FOR SPACE VEHICLES
    MIL STD 1695 : 0 ENVIRONMENTS, WORKING, MINIMUM STANDARDS FOR
    DOD STD 347 : 0 PRODUCT ASSURANCE PROGRAM REQUIREMENTS FOR FIBER OPTIC COMPONENTS
    MIL F 48382 : A FUZE, M934E6, IMPACT SWITCH FOR
    BS PD ES 59008-5.1 : 2001 DATA REQUIREMENTS FOR SEMICONDUCTOR DIE - PART 5-1: PARTICULAR REQUIREMENTS AND RECOMMENDATIONS FOR DIE TYPES - BARE DIE
    ASTM E 2090 : 2012 : REDLINE Standard Test Method for Size-Differentiated Counting of Particles and Fibers Released from Cleanroom Wipers Using Optical and Scanning Electron Microscopy
    01/206130 DC : DRAFT AUG 2001 IEC 62258 - SEMICONDUCTOR DIE PRODUCTS - MINIMUM REQUIREMENTS FOR PROCUREMENT AND USE - PART 1: GENERAL REQUIREMENTS - MECHANICAL, MATERIAL AND CONNECTIVITY
    MIL B 81793 : D BEARING, BALL, PRECISION, FOR INSTRUMENTS AND ROTATING COMPONENTS
    MIL G 81937 : A GREASE, INSTRUMENT, ULTRA CLEAN, METRIC
    MIL HDBK 349 : 0 MANUFACTURE AND INSPECTION OF ADHESIVE BONDED, ALUMINUM HONEYCOMB SANDWICH ASSEMBLIES FOR AIRCRAFT
    MIL STD 1359 : B CLEANING METHODS AND PROCEDURES FOR BREATHING OXYGEN EQUIPMENT
    MIL C 85300 : 0 COOLER, CRYOGENIC DETECTOR
    MIL R 28750 : C SUPP 1 RELAYS, SOLID STATE, SEALED, OPTICALLY ISOLATED, ZERO VOLTAGE TURN ON, 25 AMPERES, 250 VOLTS MAXIMUM, 45-440 HZ, POWER SWITCHING
    BS PD ES 59008-4.2 : 2001 DATA REQUIREMENTS FOR SEMICONDUCTOR DIE - PART 4-2: SPECIFIC REQUIREMENTS AND RECOMMENDATIONS - HANDLING AND STORAGE
    ASTM F 979 : 1986 : R1998 : EDT 1 Standard Test Method for Hermeticity of Hybrid Microcircuit Packages Prior to Lidding
    MIL STD 977 : 0 TEST METHODS AND PROCEDURES FOR MICROCIRCUIT LINE CERTIFICATION
    SAE AIR 4728 : 2013 REFERENCES, SPACECRAFT AND SPACECRAFT SERVICING, FLUID SYSTEM COMPONENTS (ABBREVIATIONS, ACRONYMS, DEFINITIONS, APPLICABLE DOCUMENTS AND ENVIRONMENTAL CONDITIONS)
    ASTM F 849 : 1983 : R1988 Method for Identification and Test of Structures and Contaminants Seen on Polished Gadolinium Gallium Surfaces (Withdrawn 1992)
    ASME B89.6.2 : 1973 : R2003 TEMPERATURE AND HUMIDITY ENVIRONMENT FOR DIMENSIONAL MEASUREMENT
    ASTM F 979 : 1986 : R2003 Standard Test Method for Hermeticity of Hybrid Microcircuit Packages Prior to Lidding (Withdrawn 2009)
    ASTM E 874 : 2011 : REDLINE PRACTICE FOR ADHESIVE BONDING OF ALUMINUM FACINGS TO NONMETALLIC HONEYCOMB CORE FOR SHELTER PANELS
    ANSI INCITS 199 : 1991 : R2007 INFORMATION SYSTEMS - 356 MM OPTICAL DISK CARTRIDGE (WRITE-ONCE) - TEST METHODS FOR MEDIA CHARACTERISTICS
    ASTM E 2311 : 2004 : R2016 Standard Practice for QCM Measurement of Spacecraft Molecular Contamination in Space
    MIL M 9950 : A NOTICE 1 MISSILE COMPONENTS, LIQUID OXYGEN, LIQUID NITROGEN, GASEOUS OXYGEN, GASEOUS NITROGEN, INSTRUMENT AIR, HELIUM AND FUEL HANDLING SYSTEMS, CLEANING AND PACKAGING FOR DELIVERY
    ES 59008-5-1 : 2001 DATA REQUIREMENTS FOR SEMI-CONDUCTOR DIE - PARTICULAR REQUIREMENTS AND RECOMMENDATIONS FOR DIE TYPES - BARE DIE
    MIL STD 2111 : 0 TECHNICAL REPAIR STANDARDS, ELECTRONIC (2Z/4G/7Z/7G REPAIRABLES), PREPARATION OF
    MIL V 87255 : 0 VALVE, PRESSURE, ANTI-G SUIT, HIGH FLOW
    ASME B89.6.2 : 1973 : R2012 TEMPERATURE AND HUMIDITY ENVIRONMENT FOR DIMENSIONAL MEASUREMENT
    ASTM E 1731M : 1995 Standard Test Method for Gravimetric Determination of Nonvolatile Residue from Cleanroom Gloves [Metric] (Withdrawn 2000)
    ANSI INCITS 199 : 1991 : R2002 INFORMATION SYSTEMS - 356 MM OPTICAL DISK CARTRIDGE (WRITE-ONCE) - TEST METHODS FOR MEDIA CHARACTERISTICS
    ES 59008-4-2 : 2000 DATA REQUIREMENTS FOR SEMICONDUCTOR DIE : SPECIFIC REQUIREMENTS AND RECOMMENDATIONS HANDLING AND STORAGE
    MIL B 913 : 0 BEARINGS, BALL, ANNULAR, FOR INSTRUMENTS AND PRECISION ROTATING COMPONENTS (METRIC) GENERAL SPECIFICATION FOR
    MIL T 24747 : 0 TECHNICAL REPAIR STANDARDS (TRS) MANUAL; PREPARATION OF
    MIL STD 206 : B FRICTION TORQUE TESTING FOR INSTRUMENT BALL BEARINGS PARTS 1 AND 2
    SAE AS 13591 : 2001 CLEANING METHODS &PROCEDURES FOR BREATHING OXYGEN EQUIPMENT
    ASTM E 1234 : 2012 : REDLINE Standard Practice for Handling, Transporting, and Installing Nonvolatile Residue (NVR) Sample Plates Used in Environmentally Controlled Areas for Spacecraft
    BS PD ES 59008-2 : 1999 DATA REQUIREMENTS FOR SEMICONDUCTOR DIE - PART 2: VOCABULARY
    ASTM F 816 : 1983 : R1998 : EDT 1 Standard Test Method for Combined Fine and Gross Leaks for Large Hybrid Microcircuit Packages
    ANSI INCITS 191 : 1991 INFORMATION SYSTEMS - RECORDED OPTICAL MEDIA UNIT FOR DIGITAL INFORMATION INTERCHANGE - 130 MM WRITE-ONCE SAMPLED-SERVO RZ SELECTABLE-PITCH OPTICAL DISK CARTRIDGE
    ANSI INCITS 246 : 1994 INFORMATION PROCESSING SYSTEMS - TEST METHODS FOR MEDIA CHARACTERISTICS OF 90 MM READ ONLY AND REWRITABLE M.O. OPTICAL DISK DATA STORAGE CARTRIDGE WITH DISCRETE BLOCK FORMAT (DBF)
    I.S. EN 62258-1:2010 SEMICONDUCTOR DIE PRODUCTS - PART 1: PROCUREMENT AND USE
    ANSI INCITS 213 : 1994 INFORMATION TECHNOLOGY - 90-MM (3.54-IN) OPTICAL DISK CARTRIDGE REWRITABLE AND READ ONLY USING DISCRETE BLOCK FORMAT (DBF) METHOD FOR DIGITAL INFORMATION INTERCHANGE
    ANSI INCITS 234 : 1993 INFORMATION SYSTEMS - TEST METHODS FOR MEDIA CHARACTERISTICS - 130 MM REWRITABLE OPTICAL DISK DATA STORAGE CARTRIDGES WITH CONTINUOUS COMPOSITE SERVO (CCS)
    ASTM F 1394 : 1992 : R2012 Standard Test Method for Determination of Particle Contribution from Gas Distribution System Valves
    ASTM E 2352 : 2019 Standard Practice for Aerospace Cleanrooms and Associated Controlled Environments—Cleanroom Operations
    ASTM E 1549/E1549M : 2013 Standard Specification for ESD Controlled Garments Required in Cleanrooms and Controlled Environments for Spacecraft for Non-Hazardous and Hazardous Operations
    ASTM E 2311 : 2004 : R2009 Standard Practice for QCM Measurement of Spacecraft Molecular Contamination in Space
    ASTM F 1394 : 1992 : R2005 Standard Test Method for Determination of Particle Contribution from Gas Distribution System Valves
    ASTM F 50 : 2012 Standard Practice for Continuous Sizing and Counting of Airborne Particles in Dust-Controlled Areas and Clean Rooms Using Instruments Capable of Detecting Single Sub-Micrometre and Larger Particles
    ASTM E 2042/E2042M : 2009 : R2016 Standard Practice for Cleaning and Maintaining Controlled Areas and Clean Rooms
    ASTM E 2900 : 2012 Standard Practice for Spacecraft Hardware Thermal Vacuum Bakeout
    ASTM E 2088 : 2006 : R2015 Standard Practice for Selecting, Preparing, Exposing, and Analyzing Witness Surfaces for Measuring Particle Deposition in Cleanrooms and Associated Controlled Environments
    ASTM E 1549/E1549M : 2013 : R2016 Standard Specification for ESD Controlled Garments Required in Cleanrooms and Controlled Environments for Spacecraft for Non-Hazardous and Hazardous Operations
    ASTM E 2042 : 2004 Standard Practice for Cleaning and Maintaining Controlled Areas and Clean Rooms
    ASTM E 2352 : 2004 Standard Practice for Aerospace Cleanrooms and Associated Controlled Environments-Cleanroom Operations
    ASTM E 1548 : 2009 : R2017 Standard Practice for Preparation of Aerospace Contamination Control Plans
    ASTM E 2088 : 2006 Standard Practice for Selecting, Preparing, Exposing, and Analyzing Witness Surfaces for Measuring Particle Deposition in Cleanrooms and Associated Controlled Environments
    ASTM E 2217 : 2012 : REDLINE Standard Practice for Design and Construction of Aerospace Cleanrooms and Contamination Controlled Areas
    ASTM F 612 : 1988 Practice for Cleaning Surfaces of Polished Silicon Slices (Withdrawn 1993)
    ASTM E 2352 : 2004 : R2010 Standard Practice for Aerospace Cleanrooms and Associated Controlled Environments-Cleanroom Operations
    ASTM E 1235 : 2012 : REDLINE Standard Test Method for Gravimetric Determination of Nonvolatile Residue (NVR) in Environmentally Controlled Areas for Spacecraft
    ASTM E 1235M : 1995 Test Method for Gravimetric Determination of Nonvolatile Residue (NVR) in Environmentally Controlled Areas for Spacecraft [Metric] (Withdrawn 2000)
    ASTM E 1548 : 2009 Standard Practice for Preparation of Aerospace Contamination Control Plans
    ASTM F 584 : 2006 : EDT 1 Standard Practice for Visual Inspection of Semiconductor Lead-Bonding Wire (Withdrawn 2015)
    ASTM E 2088 : 2006 : R2011 Standard Practice for Selecting, Preparing, Exposing, and Analyzing Witness Surfaces for Measuring Particle Deposition in Cleanrooms and Associated Controlled Environments
    ASTM F 1394 : 1992 : R1999 Standard Test Method for Determination of Particle Contribution from Gas Distribution System Valves
    SAE ARP 599 : 2013 AEROSPACE - DYNAMIC TEST METHOD FOR DETERMINING THE RELATIVE DEGREE OF CLEANLINESS OF THE DOWNSTREAM SIDE OF FILTER ELEMENTS
    ASTM E 2042/E2042M : 2009 Standard Practice for Cleaning and Maintaining Controlled Areas and Clean Rooms
    ASTM A 380 : 2006 Standard Practice for Cleaning, Descaling, and Passivation of Stainless Steel Parts, Equipment, and Systems
    ASTM F 50 : 2012 : R2015 Standard Practice for Continuous Sizing and Counting of Airborne Particles in Dust-Controlled Areas and Clean Rooms Using Instruments Capable of Detecting Single Sub-Micrometre and Larger Particles
    ASTM F 584 : 2006 Standard Practice for Visual Inspection of Semiconductor Lead-Bonding Wire
    ASTM F 816 : 1983 : R2003 Standard Test Method for Combined Fine and Gross Leaks for Large Hybrid Microcircuit Packages (Withdrawn 2009)
    IEC 62258-1:2009 Semiconductor die products - Part 1: Procurement and use
    BS EN 13091:2000 (published 2000-03) Biotechnology. Performance criteria for filter elements and filtration assemblies
    BS EN 14736 : 2004 SPACE PRODUCT ASSURANCE - QUALITY ASSURANCE FOR TEST CENTRES
    NASA KSC STD Z 0010 : 1983 DESIGN OF ENVIRONMENTAL CONTROL SYSTEMS, GROUND COOLANT SYSTEMS, COOLANT SERVICING SYSTEMS, AND GROUND SUPPORT EQUIPMENT, STANDARD FOR
    DIN EN 14736:2004-09 SPACE PRODUCT ASSURANCE - QUALITY ASSURANCE FOR TEST CENTRES
    EN 62258-1 : 2010 SEMICONDUCTOR DIE PRODUCTS - PART 1: PROCUREMENT AND USE
    EN 14736 : 2004 SPACE PRODUCT ASSURANCE - QUALITY ASSURANCE FOR TEST CENTRES

    Standards Referencing This Book - (Show below) - (Hide below)

    FED STD 376 : B PREFERRED METRIC UNITS FOR GENERAL USE BY THE FEDERAL GOVERNMENT
    • Access your standards online with a subscription

      Features

      • Simple online access to standards, technical information and regulations
      • Critical updates of standards and customisable alerts and notifications
      • Multi - user online standards collection: secure, flexibile and cost effective