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GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: AREAL - PART 603: NOMINAL CHARACTERISTICS OF NON-CONTACT (PHASE-SHIFTING INTERFEROMETRIC MICROSCOPY) INSTRUMENTS (ISO 25178-603:2013)

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

01-01-2013

Publisher

National Standards Authority of Ireland

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For Harmonized Standards, check the EU site to confirm that the Standard is cited in the Official Journal.

Only cited Standards give presumption of conformance to New Approach Directives/Regulations.

Foreword
Introduction
1 Scope
2 Terms and definitions
3 Descriptions of the influence quantities
Annex A (informative) - Components of a phase-shifting
        interferometric (PSI) microscope
Annex B (informative) - Phase-shifting interferometric
        (PSI) microscope - Theory of operation
Annex C (informative) - Errors and corrections for
        phase-shifting interferometric (PSI) microscopes
Annex D (informative) - Relation to the GPS
        matrix model
Bibliography

Defines the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

DocumentType	Standard
Pages	43
PublisherName	National Standards Authority of Ireland
Status	Current

Standards	Relationship
ISO 25178-603:2013	Identical
EN ISO 25178-603:2013	Identical

ISO/TR 14638:1995	Geometrical product specification (GPS) Masterplan
ISO 8015:2011	Geometrical product specifications (GPS) Fundamentals Concepts, principles and rules
ISO 4287:1997	Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
ISO 14978:2006	Geometrical product specifications (GPS) General concepts and requirements for GPS measuring equipment
ISO 25178-6:2010	Geometrical product specifications (GPS) Surface texture: Areal Part 6: Classification of methods for measuring surface texture
ISO 10934-2:2007	Optics and optical instruments Vocabulary for microscopy Part 2: Advanced techniques in light microscopy
ISO 14253-1:2017	Geometrical product specifications (GPS) — Inspection by measurement of workpieces and measuring equipment — Part 1: Decision rules for verifying conformity or nonconformity with specifications
ISO 25178-3:2012	Geometrical product specifications (GPS) — Surface texture: Areal — Part 3: Specification operators
ISO/IEC Guide 99:2007	International vocabulary of metrology Basic and general concepts and associated terms (VIM)
ISO 25178-601:2010	Geometrical product specifications (GPS) — Surface texture: Areal — Part 601: Nominal characteristics of contact (stylus) instruments
ISO 25178-602:2010	Geometrical product specifications (GPS) — Surface texture: Areal — Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments
ISO 25178-2:2012	Geometrical product specifications (GPS) Surface texture: Areal Part 2: Terms, definitions and surface texture parameters

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I.S. EN ISO 25178-603:2013

GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: AREAL - PART 603: NOMINAL CHARACTERISTICS OF NON-CONTACT (PHASE-SHIFTING INTERFEROMETRIC MICROSCOPY) INSTRUMENTS (ISO 25178-603:2013)

Table of Contents

Abstract

General Product Information

International Equivalents

Standards Referencing This Book

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