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IEC/IEEE 62659:2015

Current
Current

The latest, up-to-date edition.

Nanomanufacturing - Large scale manufacturing for nanoelectronics
Published date

09-30-2015

FOREWORD
INTRODUCTION
1 Scope
2 Normative references
3 Terms and definitions
4 Abbreviations
5 Nanomaterials incorporation into
  electronics fabrication
6 Safety and environmental issues
Bibliography

IEC/IEEE 62659:2015(E) provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. carbon nanotubes, graphene, quantum dots, etc.). Since semiconductor manufacturing facilities need to incorporate practices that maintain high yields, there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor manufacturing facilities and need to be introduced in a structured and methodical way.

DevelopmentNote
Jointly published by IEC & IEEE. (10/2015)
DocumentType
Standard
PublisherName
International Electrotechnical Committee
Status
Current

ISO 14644-6:2007 Cleanrooms and associated controlled environments Part 6: Vocabulary
ISO 14644-8:2013 Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC)
ISO/TS 80004-3:2010 Nanotechnologies Vocabulary Part 3: Carbon nano-objects
ISO 14698-2:2003 Cleanrooms and associated controlled environments Biocontamination control Part 2: Evaluation and interpretation of biocontamination data
ISO 14644-2:2015 Cleanrooms and associated controlled environments Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
ISO/TS 27687:2008 Nanotechnologies Terminology and definitions for nano-objects Nanoparticle, nanofibre and nanoplate
ISO 14644-5:2004 Cleanrooms and associated controlled environments — Part 5: Operations
IEC 62624:2009 Test methods for measurement of electrical properties of carbon nanotubes
ISO 14698-1:2003 Cleanrooms and associated controlled environments Biocontamination control Part 1: General principles and methods
IEC PAS 62565-2-1:2011 Nanomanufacturing - Material specifications - Part 2-1: Single-wall carbon nanotubes - Blank detail specification
ISO 14644-3:2005 Cleanrooms and associated controlled environments Part 3: Test methods
ISO 14644-7:2004 Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
ISO/TS 80004-1:2015 Nanotechnologies — Vocabulary — Part 1: Core terms
ISO 14644-4:2001 Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up

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