ISO 11952:2014

Withdrawn

Surface chemical analysis Scanning-probe microscopy Determination of geometric quantities using SPM: Calibration of measuring systems

Available format(s)

Hardcopy , PDF , PDF 3 Users , PDF 5 Users , PDF 9 Users

Withdrawn date

05-23-2019

Language(s)

English

Published date

05-12-2014

Publisher

International Organization for Standardization

ISO 11952:2014 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.

DevelopmentNote	DRAFT ISO/DIS 11952 is also available for this standard. (10/2014)
DocumentType	Standard
Pages	58
PublisherName	International Organization for Standardization
Status	Withdrawn
SupersededBy	ISO 11952:2019

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