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ISO 14291:2012

ISO 14291:2012

Current

Current

The latest, up-to-date edition.

Vacuum gauges — Definitions and specifications for quadrupole mass spectrometers

Available format(s)

Hardcopy , PDF , PDF 3 Users , PDF 5 Users , PDF 9 Users

Language(s)

English

Published date

07-06-2012

Publisher

International Organization for Standardization

ISO 14291:2012 defines terms relevant to quadrupole mass spectrometers (QMSs) and specifies the parameters required for specification by QMS manufacturers necessary for proper calibration and for maintaining the quality of partial pressure measurement.
ISO 14291:2012 applies to QMSs with an ion source of the electron impact ionization type. Such QMSs are designed for the measurement of atomic mass-to-charge ratios m/z typically

DevelopmentNote
Supersedes ISO/DIS 14291. (07/2012)
DocumentType
Standard
Pages
14
PublisherName
International Organization for Standardization
Status
Current

Standards Relationship
UNI ISO 14291:2020 Identical
BS ISO 14291:2012 Identical

ISO/TS 20175:2018 Vacuum technology Vacuum gauges Characterization of quadrupole mass spectrometers for partial pressure measurement

ISO 27894:2009 Vacuum technology Vacuum gauges Specifications for hot cathode ionization gauges
ISO 3529-3:2014 Vacuum technology Vocabulary Part 3: Total and partial pressure vacuum gauges
ISO 3753:1977 Vacuum technology — Graphical symbols
ISO/IEC Guide 99:2007 International vocabulary of metrology Basic and general concepts and associated terms (VIM)
ISO 3529-1:1981 Vacuum technology — Vocabulary — Part 1: General terms

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Hardcopy - English
PDF - English
PDF 3 Users - English
PDF 5 Users - English
PDF 9 Users - English
Hardcopy - English
PDF - English
PDF 3 Users - English
PDF 5 Users - English
PDF 9 Users - English
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