Surface chemical analysis — Scanning-probe microscopy — Definition and calibration of the lateral resolution of a near-field optical microscope

Available format(s)

Hardcopy , PDF , PDF 3 Users , PDF 5 Users , PDF 9 Users

Language(s)

English

Published date

07-21-2011

Publisher

International Organization for Standardization

ISO 27911:2011 describes a method for determining the spatial (lateral) resolution of an apertured near-field scanning optical microscope (NSOM) by imaging an object with a size much smaller than the expected resolution. It is applicable to aperture-type NSOMs operated in the transmission, reflection, collection or illumination/collection mode.

Committee	ISO/TC 201/SC 9
DevelopmentNote	Supersedes ISO/DIS 27911. (07/2011)
DocumentType	Standard
Pages	18
PublisherName	International Organization for Standardization
Status	Current

Standards	Relationship
BS ISO 27911:2011	Identical

ISO 18516:2006	Surface chemical analysis Auger electron spectroscopy and X-ray photoelectron spectroscopy Determination of lateral resolution
ISO 18115-2:2013	Surface chemical analysis Vocabulary Part 2: Terms used in scanning-probe microscopy