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JIS K 0143:2000

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

Surface Chemical Analysis - Secondary Ion Mass Spectrometry - Determination Of Boron Atomic Concentration In Silicon Using Uniformly Doped Materials

Available format(s)

Hardcopy

Superseded date

04-05-2023

Language(s)

Japanese

Published date

10-31-2000

DocumentType
Standard
Pages
0
PublisherName
Japanese Standards Association
Status
Superseded
SupersededBy

Standards Relationship
ISO 14237:2000 Identical

2000 [20/07/2000]

JIS Z 8402-2:1999 Accuracy (trueness and precision) of measurement methods and results Part 2: Basic method for the determination of repeatability and reproducibility of a standard measurement method
JIS K 0164:2023 Surface chemical analysis -- Secondary-ion mass spectrometry -- Method for depth profiling of boron in silicon

JIS K 0164:2010 Surface Chemical Analysis - Secondary-ion Mass Spectrometry - Method For Depth Profiling Of Boron In Silicon

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