NEN-IEC 63229:2021
Current
Current
The latest, up-to-date edition.
Semiconductor devices - Classification of defects in gallium nitride epitaxial film on silicon carbide substrate
Available format(s)
Hardcopy
Language(s)
English
Published date
05-01-2021
Publisher
NEN-IEC 63229 gives guidelines for the definition and classification of defects in GaN epitaxial film grown on SiC substrate.
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