NEN-ISO 13084:2018
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Surface chemical analysis - Secondary ion mass spectrometry - Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer
Available format(s)
Hardcopy
Language(s)
English
Published date
12-12-2018
Publisher
This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytical purposes.
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