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NF EN 62047-6 : 2010

Current

Current

The latest, up-to-date edition.

SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 6: AXIAL FATIGUE TESTING METHODS OF THIN FILM MATERIALS

Published date

01-12-2013

DevelopmentNote
Indice de classement: C96-050-6. PR NF EN 62047-6 March 2009. (03/2009)
DocumentType
Standard
PublisherName
Association Francaise de Normalisation
Status
Current

Standards Relationship
EN 62047-6:2010 Identical
IEC 62047-6:2009 Identical

IEC 62047-2:2006 Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials

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