SEMI C11-3 : 1998
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
STANDARD FOR HYDROFLUORIC ACID, VLSI GRADE
07-01-2004
01-12-2013
Reflects a chemical purity level between the currently published specification SEMI C1.8 for base level purity and the Specification Grade 2 SEMI C7.3. Purity level is typically needed by semiconductor devices with geometries of 0.8 - 1.2 microns.
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